This dataset contains the raw microscopy and spectroscopy data of (donor and receiver) substrates used in the blister-based laser-induced forward transfer (BB-LIFT) of thin and ultra-thin ZrO2. Additional information Ahmet Burak Baloglu ahmet.burak.baloglu@ut.ee This research was funded by the Estonian Research Council grants (PRG1580 and PRG753). ----------------- DATASET ----------------- This dataset includes raw high-resolution scanning electron microscopy (HR-SEM) images, optical microscopy images, Raman spectroscopy data, and energy-dispersive X-ray spectroscopy (EDX) data of donor and receiver substrates used in the blister-based laser-induced forward transfer (BB-LIFT) of thin and ultra-thin ZrO2. The dataset can be used to study the graphene flake formation and the presence of Zr after the BB-LIFT procedure, as indicated by the aforementioned microscopy and spectroscopy methods. Creators: Ahmet Burak Baloglu, Jekaterina Kozlova Organisation: University of Tartu Rights-holder: University of Tartu ----------------- TERMS OF USE ----------------- Copyright 2024 University of Tartu. This dataset is licensed by the rights-holder under a Creative Commons Attribution-Noncommercial 4.0 International Licence: https://creativecommons.org/licenses/by-nc/4.0/. ----------------- CONTENTS ----------------- Each HR-SEM image (.tif) file is uploaded with a corresponding description, indicating whether it is from the donor or receiver substrate and whether it was taken before or after the BB-LIFT process. There is one optical microscope image file (.jpg) taken from a receiver substrate after the BB-LIFT from a Si/SiO2/Cr/Al/graphene-coated donor. Dispersed (black-colored) materials are graphene flakes. The raw Raman spectra data (.txt) were taken from one of the flakes seen in the aforementioned optical microscope image. The spectra indicate characteristic graphene with slight defectiveness, as shown by the D band peak. The EDX data files (.doc) contain EDX mapping and spectra from two different spots on the receiver substrates after the BB-LIFT procedure using 30 nm ZrO2-coated donors (with a graphene release layer). ----------------- METHODS and PROCESSING ----------------- Optical microscopy (Axioskop 2, Zeiss) and Raman spectroscopy (Renishaw, inVia, excitation wavelength 514 nm, spot size ~ 1 μm) were employed to analyze surfaces of the donor and receiver substrates before and after the BB-LIFT procedure. High-resolution scanning electron microscopy (HR-SEM) (Helios NanoLab 600, FEI Company) and energy-dispersive X-ray spectroscopy (EDX) (INCA Energy 350, Oxford Instruments), conducted in the same SEM, were utilized to visualize and perform elemental analysis on the receiver substrates after the BB-LIFT process. -----------------